Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

被引：5
作者：
Kanda, Kazuhiro [1 ]
Imai, Ryo [1 ]
Niibe, Masahito [1 ]
Yoshioka, Hisashi [2 ]
Komatsu, Keishi [2 ]
Saitoh, Hidetoshi [2 ]
机构：
[1] Univ Hyogo, Lab Adv Sci & Technol Ind, 3-1-2 Koto, Kamigori, Hyogo 6781205, Japan
[2] Nagaoka Univ Technol, Grad Sch Engn, 16031-1 Kamitomioka, Nagaoka, Niigata 9402188, Japan
来源：
SENSORS AND MATERIALS | 2017年 / 29卷 / 06期
关键词：
diamond-like carbon; hydrogen desorption; soft X-ray; film modification; NEXAFS; ABSORPTION FINE-STRUCTURE; AMORPHOUS-CARBON; SPECTROSCOPIC ELLIPSOMETRY; SYNCHROTRON-RADIATION; OPTICAL-PROPERTIES; LONG UNDULATOR; DEPOSITION; SURFACE; COATINGS; GAS;
D O I：
10.18494/SAM.2017.1476
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.
引用
收藏
页码：817 / 826
页数：10
相关论文
共 50 条
[41]   Molecular dynamical simulation on the mechanical property of hydrogenated diamond-like carbon films [J].
Quan Wei-Long ;
Li Hong-Xuan ;
Ji Li ;
Zhao Fei ;
Du Wen ;
Zhou Hui-Di ;
Chen Jian-Min .
ACTA PHYSICA SINICA, 2010, 59 (08) :5687-5691
[42]   Effect of Water Adsorption on Microtribological Properties of Hydrogenated Diamond-Like Carbon Films [J].
Masahito Tagawa ;
Masashi Ikemura ;
Yoshihito Nakayama ;
Nobuo Ohmae .
Tribology Letters, 2004, 17 :575-580
[43]   Role of Surface Hydrogen Bonds in Determining the Friction Behaviors of Hydrogenated Diamond-like Carbon Films [J].
Wang Cheng-Bing ;
Shi Jing ;
Geng Zhong-Rong ;
Zhang Jun-Yan .
CHINESE PHYSICS LETTERS, 2012, 29 (05)
[44]   Some electrical properties of diamond-like carbon thin films [J].
Staryga, E ;
Bak, GW ;
Dluzniewski, M .
VACUUM, 2004, 74 (02) :325-330
[45]   Effect of Oxygen Atmosphere on Infrared Properties of Non-Hydrogenated Diamond-Like Carbon Films [J].
Lu Yimin ;
Huang Guojun ;
Wang Sai ;
Mi Chaowei ;
Cai Xiaohong ;
Tian Fangtao ;
Cheng Yong .
CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2020, 47 (04)
[46]   Preparation and Characterization of Sulfurized Tungsten Doped Non-hydrogenated Diamond-Like Carbon Films [J].
Liu, Zhimin ;
Yue, Wen ;
Wang, Song ;
Fu, Zhiqiang ;
Wang, Chengbiao ;
Liu, Jiajun .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 2015, 35 (04) :769-783
[47]   Deposition of diamond-like carbon thin films by the high power impulse magnetron sputtering method [J].
Wiatrowski, A. ;
Kijaszek, W. ;
Posadowski, W. M. ;
Oleszkiewicz, W. ;
Jadczak, J. ;
Kunicki, P. .
DIAMOND AND RELATED MATERIALS, 2017, 72 :71-76
[48]   Structure, scratch resistance and corrosion performance of nickel doped diamond-like carbon thin films [J].
Khun, N. W. ;
Liu, E. ;
Yang, G. C. .
SURFACE & COATINGS TECHNOLOGY, 2010, 204 (20) :3125-3130
[49]   Near-edge X-ray absorption fine-structure characterization of diamond-like carbon thin films formed by various methods [J].
Saikubo, Akihiko ;
Kanda, Kazuhiro ;
Niibe, Masahito ;
Matsui, Shinji .
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2006, 16 (05) :235-244
[50]   Corrosion Behavior of Aluminum Doped Diamond-Like Carbon Thin Films in NaCl Aqueous Solution [J].
Khun, N. W. ;
Liu, E. .
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2010, 10 (07) :4767-4772
12345