Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

被引：5

作者：

Kanda, Kazuhiro ^{[1
]}

Imai, Ryo ^{[1
]}

Niibe, Masahito ^{[1
]}

Yoshioka, Hisashi ^{[2
]}

Komatsu, Keishi ^{[2
]}

Saitoh, Hidetoshi ^{[2
]}

机构：

[1] Univ Hyogo, Lab Adv Sci & Technol Ind, 3-1-2 Koto, Kamigori, Hyogo 6781205, Japan

[2] Nagaoka Univ Technol, Grad Sch Engn, 16031-1 Kamitomioka, Nagaoka, Niigata 9402188, Japan

来源：

SENSORS AND MATERIALS | 2017年 / 29卷 / 06期

关键词：

diamond-like carbon; hydrogen desorption; soft X-ray; film modification; NEXAFS; ABSORPTION FINE-STRUCTURE; AMORPHOUS-CARBON; SPECTROSCOPIC ELLIPSOMETRY; SYNCHROTRON-RADIATION; OPTICAL-PROPERTIES; LONG UNDULATOR; DEPOSITION; SURFACE; COATINGS; GAS;

D O I：

10.18494/SAM.2017.1476

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.

引用

页码：817 / 826

页数：10

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