Influence of ALD Coating Layers on the Optical Properties of Nanoporous Alumina-Based Structures

被引：15
|
作者：
Cuevas, Ana L. [1 ]
Martinez de Yuso, Maria del Valle [2 ]
Vega, Victor [3 ]
Silvia Gonzalez, Ana [4 ]
Prida, Victor M. [4 ]
Benavente, Juana [5 ]
机构：
[1] Univ Malaga, SCBI Ctr, Unidad Nanotecnol, E-29071 Malaga, Spain
[2] Univ Malaga, Serv Cent Invest, E-29071 Malaga, Spain
[3] Univ Oviedo, Serv Cient Tecn, Lab Membranas Nanoporosas, E-33006 Oviedo, Spain
[4] Univ Oviedo, Fac Ciencias, Dept Fis, E-33007 Oviedo, Spain
[5] Univ Malaga, Fac Ciencias, Dept Fis Aplicada 1, E-29071 Malaga, Spain
来源：
COATINGS | 2019年 / 9卷 / 01期
关键词：
nanoporous anodic alumina structures; ALD coating; XPS; spectroscopic ellipsometry; transmittance; ANODIC ALUMINA; DRUG-DELIVERY; IONIC TRANSPORT; MEMBRANES; DEPOSITION; BIOCOMPATIBILITY; OXIDE; SILICON; ARRAYS; FILMS;
D O I：
10.3390/coatings9010043
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Optical changes associated with the surface coating of different metal oxides and nanolayers by the ALD technique of a nanoporous alumina structure (NPAS) obtained by the two-step anodization method were analyzed. The NPASs were coated with: (i) a single layer (SiO2 or TiO2), and (ii) a double layer of SiO2 plus Al2O3 or aluminum doped ZnO (AZO) to estimate the effect of surface layer coverage material, geometrical parameters (pore-size/porosity), and number of layers on light transmission/reflection. Chemical surface characterization of the different NPASs was carried out by analyzing XPS spectra, which allowed us to obtain an estimation of the coating layer homogeneity. Transmittance and spectroscopic ellipsometry measurements were analyzed in order to detect changes in characteristic optical parameters such as band gap, refractive index, and extinction coefficients associated with the material and the characteristics of the single or double coating layers.
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页数：13
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