Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties

被引：118

作者：

Jauberteau, Isabelle ^{[1
]}

Bessaudou, Annie ^{[2
]}

Mayet, Richard ^{[1
]}

Cornette, Julie ^{[1
]}

Jauberteau, Jean Louis ^{[1
]}

Carles, Pierre ^{[1
]}

Merle-Mejean, Therese ^{[1
]}

机构：

[1] Univ Limoges, SPCTS UMR7315, ENSCI, CNRS, F-87000 Limoges, France

[2] Univ Limoges, XLIM UMR6172, CNRS, F-87060 Limoges, France

来源：

COATINGS | 2015年 / 5卷 / 04期

关键词：

molybdenum nitride coatings; film deposition process; crystal structure; mechanical properties; electrical properties; superconductivity; TRANSITION-METAL NITRIDES; THIN-FILMS; ELECTRONIC-STRUCTURES; MON FILMS; PHASE; DEPOSITION; REDUCTION; MO2N; SUPERCONDUCTIVITY; MICROSTRUCTURE;

D O I：

10.3390/coatings5040656

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Among transition metal nitrides, molybdenum nitrides have been much less studied even though their mechanical properties as well as their electrical and catalytic properties make them very attractive for many applications. The delta-MoN phase of hexagonal structure is a potential candidate for an ultra-incompressible and hard material and can be compared with c-BN and diamond. The predicted superconducting temperature of the metastable MoN phase of NaCl-B1-type cubic structure is the highest of all refractory carbides and nitrides. The composition of molybdenum nitride films as well as the structures and properties depend on the parameters of the process used to deposit the films. They are also strongly correlated to the electronic structure and chemical bonding. An unusual mixture of metallic, covalent and ionic bonding is found in the stoichiometric compounds.

引用

页码：656 / 687

页数：32

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