Micro/nanofabrication of two and three dimensional structures by two-photon polymerization

被引：0

作者：

Duan, XM ^{[1
]}

Sun, HB ^{[1
]}

Kaneko, K ^{[1
]}

Nakamura, A ^{[1
]}

Shoji, S ^{[1
]}

Kawata, S ^{[1
]}

机构：

[1] Japan Sci & Technol Corp, CREST, Suita, Osaka 5650871, Japan

来源：

2003 THIRD IEEE CONFERENCE ON NANOTECHNOLOGY, VOLS ONE AND TWO, PROCEEDINGS | 2003年

关键词：

nanoparticles; micro/nanofabrication; two-photon polymerization; photonic crystals;

D O I：

暂无

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. 2D & 3D polymeric structures were fabricated by two-photon polymerization. These features were produced by designing multibeam interference and writing patterns. The influence of post-developing process, which leads to a dramatic change in 2D rod array, also be discussed. These methods provide simple and rapid approaches for creating templates with designed 2D & 3D structure in micro/nanometer scales.

引用

页码：498 / 501

页数：4

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