Silicon micromachining - Sensors to systems

被引：77

作者：

Kovacs, GTA ^{[1
]}

Petersen, K ^{[1
]}

Albin, M ^{[1
]}

机构：

[1] STANFORD UNIV, STANFORD, CA 94305 USA

来源：

ANALYTICAL CHEMISTRY | 1996年 / 68卷 / 13期

关键词：

D O I：

10.1021/ac961977i

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：A407 / A412

页数：6

共 31 条

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