A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

被引：0
作者：
Kanda, T [1 ]
Makino, A [1 ]
Suzumori, K [1 ]
Morita, T [1 ]
Kurosawa, MK [1 ]
机构：
[1] Okayama Univ, Fac Engn, Dept Syst Engn, Okayama, Japan
来源：
2004 IEEE Ultrasonics Symposium, Vols 1-3 | 2004年
关键词：
piezoelectric actuator; ultrasonicmotor; micromotor; bulk piezoelectric material; micro machining;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
引用
收藏
页码：1298 / 1301
页数：4
相关论文
共 10 条
[1]   A piezoelectric micromotor with a stator of φ=1.6 mm and l=4 mm using bulk PZT [J].
Cagatay, S ;
Koc, B ;
Moses, P ;
Uchino, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (4A) :1429-1433
[2]   Piezoelectric ultrasonic micromotor with 1.5 mm diameter [J].
Dong, SX ;
Lim, SP ;
Lee, KH ;
Zhang, JD ;
Lim, LC ;
Uchino, K .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (04) :361-367
[3]   Development of a self-oscillating ultrasonic micro-motor and its application to a watch [J].
Iino, A ;
Suzuki, K ;
Kasuga, M ;
Suzuki, M ;
Yamanaka, T .
ULTRASONICS, 2000, 38 (1-8) :54-59
[4]  
KANDA T, 2003, P 5 WORLD C ULTR, P833
[5]   A piezoelectric motor using two orthogonal bending modes of a hollow cylinder [J].
Koc, B ;
Cagatay, S ;
Uchino, K .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2002, 49 (04) :495-500
[6]   Miniature piezoelectric motors [J].
Morita, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 103 (03) :291-300
[7]   A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer) [J].
Morita, T ;
Kurosawa, MK ;
Higuchi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :225-230
[8]   An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film [J].
Morita, T ;
Kurosawa, M ;
Higuchi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1995, 50 (1-2) :75-80
[9]  
Morita T., 1999, JPN J APPL PHYS, V38, P3327
[10]   Development of a new type piezoelectric micromotor [J].
Suzuki, Y ;
Tani, K ;
Sakuhara, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :244-248
1