A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

被引：0

作者：

Kanda, T ^{[1
]}

Makino, A ^{[1
]}

Suzumori, K ^{[1
]}

Morita, T ^{[1
]}

Kurosawa, MK ^{[1
]}

机构：

[1] Okayama Univ, Fac Engn, Dept Syst Engn, Okayama, Japan

来源：

2004 IEEE Ultrasonics Symposium, Vols 1-3 | 2004年

关键词：

piezoelectric actuator; ultrasonicmotor; micromotor; bulk piezoelectric material; micro machining;

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.

引用

页码：1298 / 1301

页数：4

共 10 条

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