Simulation Studies on Bipolar Electrostatic Chucks

被引：0
|
作者：
Li, Chih-Hung [1 ]
Chiu, Yi-Fan [1 ]
Yu, Yi-Hsiuan [2 ]
Chen, Jian-Zhang [1 ]
机构：
[1] Natl Taiwan Univ, Grad Inst Appl Mech, Taipei 10617, Taiwan
[2] Natl Chung Shan Inst Sci & Technol, Chem Syst Res Div, Taoyuan 32546, Taiwan
来源：
2015 10TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) | 2015年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We use Comsol Multiphysics, a finite element simulation tool to study a bipolar electrostatic chuck (E-chuck). The influences of the substrate and dielectric types, wafer thickness, and air gap are investigated.
引用
收藏
页码：382 / 385
页数：4
相关论文
共 50 条
  • [21] CHUCKS FOR HIGH-TEMPERATURE ELECTRON-MICROSCOPE STUDIES
    YAGAFAROV, SS
    MAIOROV, IV
    INDUSTRIAL LABORATORY, 1989, 55 (09): : 1065 - 1065
  • [22] Numerical Simulation and Experimental Studies for High Gas Velocity Electrostatic Precipitator
    Yi, Chengwu
    Zhao, Yunqing
    Yi, Rongjie
    Yin, Tian
    ADVANCED MANUFACTURING TECHNOLOGY, PTS 1-4, 2012, 472-475 : 2129 - +
  • [23] Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks
    Xu, Sanchuan
    Taoka, Yuki
    Saito, Shigeki
    RESULTS IN ENGINEERING, 2024, 24
  • [24] Modeling of Electrostatic Chuck and Simulation of Electrostatic Force
    Wang, Xingkuo
    Cheng, Jia
    Wang, Kesheng
    Yang, Yiyong
    Sun, Yuchun
    Cao, Minglu
    Han, Chuankun
    Ji, Linhong
    SENSORS, MECHATRONICS AND AUTOMATION, 2014, 511-512 : 588 - +
  • [25] Simulation studies on the impact of the firing of action potential of myocytes with bipolar pulses
    Zhang, Ruizhe
    Li, Chengxiang
    Yao, Chenguo
    Mi, Yan
    2015 IEEE PULSED POWER CONFERENCE (PPC), 2015,
  • [26] SIMULATION OF ELECTROSTATIC DISCHARGES
    PROBST, W
    ELEKTROTECHNISCHE ZEITSCHRIFT-ETZ, 1979, 100 (10): : 494 - 497
  • [27] SIMULATION OF ELECTROSTATIC DISCHARGES
    ROTH, R
    JOURNAL OF ELECTROSTATICS, 1990, 24 (02) : 207 - 220
  • [28] Modeling and simulation for the critical bending force of power chucks to guarantee high machining precision
    Wang, Jianjian
    Zhang, Jianfu
    Feng, Pingfa
    Wu, Zhijun
    Zhang, Guobin
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 79 (5-8): : 1081 - 1094
  • [29] Electrostatic elimination of charged particles by DC-type bipolar electrostatic eliminator
    Zhou, Qun
    Li, Liangliang
    Bi, Xiaotao
    Zhang, Gaoqiang
    Cao, Zhen
    Meng, He
    Lan, Qi
    Liang, Cai
    Chen, Xiaoping
    Ma, Jiliang
    POWDER TECHNOLOGY, 2022, 408
  • [30] Evaluation of Electrostatic Force on Bipolar Charged Electret
    Sonoda, K.
    Minami, K.
    Miwatani, N.
    Fujita, T.
    Kanda, K.
    Maenaka, K.
    14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 2014, 557
12345