Synthesis of indium tin oxide films from ethyl acetoacetonato complexes at low temperatures

被引：6
|
作者：
Gunji, Takahiro [1 ,2 ]
Nakamura, Kotoe [1 ]
Hayami, Ryohei [1 ,3 ]
Aimi, Akihisa [1 ]
Fujimoto, Kenjiro [1 ,2 ]
Yamamoto, Kazuki [1 ]
机构：
[1] Tokyo Univ Sci, Fac Sci & Technol, Dept Pure & Appl Chem, 2641 Yamazaki, Noda, Chiba 2788510, Japan
[2] Tokyo Univ Sci, Res Inst Sci & Technol RIST, Res Grp Adv Energy Convers, 2641 Yamazaki, Noda, Chiba 2788510, Japan
[3] Zoome LLC, Shinjuku Ku, 1-36-2-3F Shinjuku, Tokyo 1600022, Japan
来源：
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2021年 / 100卷 / 01期
基金：
日本学术振兴会;
关键词：
Indium tin oxide; Indium oxide; Tin oxide; Recycling; Ethyl acetoacetato complex; THIN-FILMS; PHASE;
D O I：
10.1007/s10971-021-05618-7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A novel recycling system for indium in indium tin oxide (ITO), which comprises the dissolution of indium oxide (In2O3), chlorination, chelation, and steaming treatment, was established. Indium trichloride (InCl3) was quantitatively synthesized by the reaction of In2O3 with hydrochloric acid (HCl) and furnished tris(ethyl acetoacetato)indium (In(etac)(3)) in a high yield by a subsequent reaction with ethyl acetoacetate (Hetac). In(etac)(3) was mixed with bis(acetylacetonato)tin dichloride (Sn(acac)(2)Cl-2) and spin coated on a glass plate, followed by steaming and heating to obtain ITO films containing 10 wt% tin oxide. In2O3 was crystallized in c-, rh-, and o-In2O3. This film showed a resistivity of 9.7 Omega cm and a transparency of 86%.
引用
收藏
页码：68 / 73
页数：6
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