Development of a synchrotron biaxial tensile device for in situ characterization of thin films mechanical response

被引：45

作者：

Geandier, G. ^{[1
,2
,3
]}

Thiaudiere, D. ^{[2
]}

Randriamazaoro, R. N. ^{[3
]}

Chiron, R. ^{[3
]}

Djaziri, S. ^{[1
]}

Lamongie, B. ^{[1
]}

Diot, Y. ^{[1
]}

Le Bourhis, E. ^{[1
]}

Renault, P. O. ^{[1
]}

Goudeau, P. ^{[1
]}

Bouaffad, A. ^{[2
]}

Castelnau, O. ^{[3
]}

Faurie, D. ^{[3
]}

Hild, F. ^{[4
]}

机构：

[1] Univ Poitiers, Dept PMM, SP2MI, Inst Pprime,ENSMA,CNRS,UPR 3346, F-86962 Futuroscope, France

[2] Synchrotron SOLEIL, LOrme Merisiers, F-91192 Gif Sur Yvette, France

[3] Univ Paris 13, CNRS, LPMTM, UPR 9001, F-93430 Villetaneuse, France

[4] LMT Cachan, F-94235 Cachan, France

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 10期

关键词：

X-RAY-DIFFRACTION; NANOCRYSTALLINE METALS; CRUCIFORM SPECIMENS; ELASTIC-CONSTANTS; LATTICE STRAINS; DIFFRACTOMETER; DEFORMATION; MULTILAYERS; RATIO; SIZE;

D O I：

10.1063/1.3488628

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in the synchrotron environment for in situ diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under controlled, applied strain field. Technological challenges comprise the sample design including fixation of the substrate ends, the related generation of a uniform strain field in the studied (central) volume, and the operations from the beamline pilot. Preliminary tests on 150 nm thick W films deposited onto polyimide cruciform substrates are presented. The obtained results for applied strains using x-ray diffraction and digital image correlation methods clearly show the full potentialities of this new setup. (C) 2010 American Institute of Physics. [doi:10.1063/1.3488628]

引用

页数：8

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