Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

被引：13
作者：
Franta, D
Ohlídal, I
Mistrík, J
Yamaguchi, T
Hu, GJ
Dai, N
机构：
[1] Masaryk Univ, Lab Plasma Phys & Plasma Sources, Fac Sci, Brno 61137, Czech Republic
[2] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
[3] Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2005年 / 244卷 / 1-4期
关键词：
PZT films; optical constants; ellipsometry; reflectometry;
D O I：
10.1016/j.apsusc.2004.10.089
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190-1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：338 / 342
页数：5
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