Modifications to thermophysical behavior in ultrathin polymer films

被引：1

作者：

D'Amour, JN ^{[1
]}

Frank, CW ^{[1
]}

Okoroanyanwu, U ^{[1
]}

机构：

[1] Stanford Univ, Dept Chem Engn, Stanford, CA 94305 USA

来源：

ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XX, PTS 1 AND 2 | 2003年 / 5039卷

关键词：

polymer; glass transition temperature; ultrathin film; polystyrene; dewetting; fluorescence; defects;

D O I：

10.1117/12.485111

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Understanding defects in ultrathin polymer films is of great importance to the microelectronics industry. We have taken the approach of trying to understand factors in polymer mobility by changes in glass transition temperature (Tg) and dewetting behavior. Incorporating fullerite into polystyrene (PS) films increased Tg relative to pure films. Photocrosslinkable PS showed a linear decrease in Tg with decreasing film thickness. Pyrene end-tagged polystyrene (PS-Py) and PS (both Mw = 4k) were compared on glass and gold substrates. Fluorescence data gave evidence of a higher probability of pyrene groups in proximity to the gold interface. This change in spatial distribution would be related to increases in Tg and suppression of dewetting for PS-Py films on gold.

引用

页码：996 / 1007

页数：12

共 26 条

[1] Suppression of dewetting in nanoparticle-filled polymer films [J].

Barnes, KA ;

Karim, A ;

Douglas, JF ;

Nakatani, AI ;

Gruell, H ;

Amis, EJ .

MACROMOLECULES, 2000, 33 (11) :4177-4185

[2] COMMENTS ON CLASSICAL THEORY OF ENERGY-TRANSFER [J].

CHANCE, RR ;

PROCK, A ;

SILBEY, R .

JOURNAL OF CHEMICAL PHYSICS, 1975, 62 (06) :2245-2253

[3] Measuring thermophysical properties of ultrathin photoresist films [J].

D'Amour, JN ;

Frank, CW ;

Okoroanyanwa, U .

ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIX, PTS 1 AND 2, 2002, 4690 :936-942

[4] Interface and chain confinement effects on the glass transition temperature of thin polymer films [J].

Forrest, JA ;

DalnokiVeress, K ;

Dutcher, JR .

PHYSICAL REVIEW E, 1997, 56 (05) :5705-5716

[5]

Forrest JA, 2000, POLYMER SURFACES, INTERFACES AND THIN FILMS, P251

[6] Thermal probe measurements of the glass transition temperature for ultrathin polymer films as a function of thickness [J].

Fryer, DS ;

Nealey, PF ;

de Pablo, JJ .

MACROMOLECULES, 2000, 33 (17) :6439-6447

[7]

ISRAELACHVILI J, 1992, INTERMOLECULAR SURFA, pCH11

[8]

Kawaoka H, 2001, J CERAM PROCESS RES, V2, P1

[9] SIZE-DEPENDENT DEPRESSION OF THE GLASS-TRANSITION TEMPERATURE IN POLYMER-FILMS [J].

KEDDIE, JL ;

JONES, RAL ;

CORY, RA .

EUROPHYSICS LETTERS, 1994, 27 (01) :59-64

[10] INTERFACE AND SURFACE EFFECTS ON THE GLASS-TRANSITION TEMPERATURE IN THIN POLYMER-FILMS [J].

KEDDIE, JL ;

JONES, RAL ;

CORY, RA .

FARADAY DISCUSSIONS, 1994, 98 :219-230

← 1 2 3 →