[1] Tsinghua Univ, Dept Engn Mech, Ctr Mech & Mat, AML, Beijing 100084, Peoples R China
[2] Univ Illinois, Frederick Seitz Mat Res Lab, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[3] Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
[4] Northwestern Univ, Ctr Engn & Hlth, Skin Dis Res Ctr, Dept Civil & Environm Engn, Evanston, IL 60208 USA
[5] Northwestern Univ, Dept Mech Engn, Ctr Engn & Hlth, Skin Dis Res Ctr, Evanston, IL 60208 USA
[6] Univ Illinois, Frederick Seitz Mat Res Lab, Beckman Inst Adv Sci & Technol, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[7] Univ Illinois, Frederick Seitz Mat Res Lab, Beckman Inst Adv Sci & Technol, Dept Chem Mech Sci & Engn, Urbana, IL 61801 USA
[8] Univ Illinois, Frederick Seitz Mat Res Lab, Beckman Inst Adv Sci & Technol, Dept Elect & Comp Engn, Urbana, IL 61801 USA