An Equivalent Circuit Model for Curved Piezoelectric Micromachined Ultrasonic Transducers with Spherical-shape Diaphragms

被引：7
作者：
Akhbari, Sina [1 ]
Sammoura, Firas [1 ,2 ]
Lin, Liwei [1 ]
机构：
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[2] Masdar Inst Sci & Technol, Dept Elect Engn & Comp Sci, Abu Dhabi, U Arab Emirates
来源：
2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2014年
关键词：
piezoelectric elastic shells; equivalent circuit model; piezoelectric micromachined ultrasonic transducer; curved pMUT;
D O I：
10.1109/ULTSYM.2014.0074
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
An equivalent circuit model is analytically derived for a clamped piezoelectric elastic shell with a spherical curved shape. The lumped parameters of the electromechanical elements are extracted from the system equations, and the analytical circuit model is compared with acoustic-piezoelectric FEM simulation results. Very good consistencies are achieved in the frequency responses, electromechanical coupled variations, and the device input impedances.
引用
收藏
页码：301 / 304
页数：4
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