Coercivity in SmCo hard magnetic films for MEMS applications

被引：33

作者：

Pina, E

Palomares, FJ

García, MA

Cebollada, F

de Hoyos, A

Romero, JJ

Hernando, A

González, JM

机构：

[1] Univ Complutense Madrid, RENFE, Inst Magnetismo Aplicado, Madrid 28230, Spain

[2] CSIC, Inst Ciencia Mat Madrid, E-28049 Madrid, Spain

[3] EUITT UPM, Dept Fis Aplicada Telecomunicac, Madrid 28031, Spain

[4] IMA, Unidad Asociada ICMM, Madrid 28230, Spain

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 290卷

关键词：

magnetic films; coercivity;

D O I：

10.1016/j.jmmm.2004.11.410

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work we have investigated the thermal dependence of coercivity in 1.5 mu m thick SmCo5 films fabricated by sputtering technique. Samples were deposited onto Si substrates kept at different temperatures. Samples grown below 450 degrees C are amorphous, present low coercivity and require further crystallization processes in order to obtain the 1:5 SmCo hard phase. Samples grown at 450 degrees C are nanocrystalline in the as-deposited state and exhibit high room temperature in-plane coercivity. Correlation between the thermal dependence of coercivity and the nanostructure has been analyzed in the frame of the so-called micromagnetic model. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：1234 / 1236

页数：3

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