Piezoresistive Micro-accelerometer with Supplement Structure

被引：0

作者：

Tian, Bian ^{[1
]}

Wang, Peng ^{[1
]}

Zhao, Yulong ^{[1
]}

Jiang, Zhuangde

Shen, Bo ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst Egineering, Xian, Shaanxi Provinc, Peoples R China

[2] Civil Aviat Univ China, Tianjin, Peoples R China

来源：

2015 IEEE 10TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2015年

关键词：

MEMS; accelerometer; vibration detection; spindle;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In order to establish optimal structure for micro vibration due to electric spark occurs in the faulty cable. A novel acceleration sensing with supplement beams structure utilizing the piezoresistive principle is presented and compared with traditional structures. The mechanical model and its simulation solution are built up and carried on, including the calculation of the sensitivity and frequency behavior of several sensor structures. The sensor is built up as an sense beam and supplement beam is supposed to have high sensitivity, higher resonant frequency and minimized lateral effect. For the designed sensor structure, the formula of stress, natural frequency and damping was derived in theory, and the optimized structure is confirmed through adjust the beams size.

引用

页码：107 / 110

页数：4

共 50 条

[41] Squeeze Film Air Damping Analysis of MEMS Piezoresistive Accelerometer [J].

Mukhiya, R. ;

Bhattacharyya, T. K. .

ICSE: 2008 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2008, :198-202

[42] A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer [J].

Yan, Shitao ;

Liu, Huafeng ;

Xu, Qiangwei ;

Liu, Dandan ;

Zhang, Mengqi ;

Wu, Wenjie ;

Tu, Liangcheng .

SENSORS AND ACTUATORS A-PHYSICAL, 2020, 312

[43] Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension-Compression Structure [J].

Wang, Peng ;

Yang, Yujun ;

Chen, Manlong ;

Zhang, Changming ;

Wang, Nan ;

Yang, Fan ;

Peng, Chunlei ;

Han, Jike ;

Dai, Yuqiang .

MICROMACHINES, 2023, 14 (08)

[44] A novel four-beams piezoresistive accelerometer [J].

Zhang, ZH ;

Liu, LT ;

Wen, MS .

INTERNATIONAL CONFERENCE ON SENSOR TECHNOLOGY (ISTC 2001), PROCEEDINGS, 2001, 4414 :280-283

[45] Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer [J].

Zhao, Yulong ;

Li, Xiaobo ;

Liang, Jing ;

Jiang, Zhuangde .

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2013, 27 (03) :831-836

[46] Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability [J].

Zhang, W ;

Cao, XP ;

Liu, B ;

Zhang, DC .

ADVANCES IN MICROELECTRONIC DEVICE TECHNOLOGY, 2001, 4600 :184-187

[47] An experimentation of hand-arm tremor control using low-g area-changed capacitive micro-accelerometer [J].

Gomathi, K. ;

Sathiyavathi, S. ;

Thomas, A. Tony ;

Arunkumar, V .

TRANSACTIONS OF THE INSTITUTE OF MEASUREMENT AND CONTROL, 2024, 46 (14) :2742-2756

[48] Liquid Packaging Effects On Piezoresistive MEMS Accelerometer [J].

Liu, Xixiang ;

Jiang, Weile ;

Zhao, Libo ;

Jia, Chen ;

Yu, Mingzhi ;

Jiang, Zhuangde .

2018 5TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2018), 2018, :81-84

[49] Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer [J].

Yulong Zhao ;

Xiaobo Li ;

Jing Liang ;

Zhuangde Jiang .

Journal of Mechanical Science and Technology, 2013, 27 :831-836

[50] High Performance Piezoresistive Accelerometer based on the Slot Etching in the EB(eight-beam) Structure [J].

Wang, Peng ;

Zhao, Yulong ;

Zhao, You ;

Zhang, Qi ;

Wang, Zixi .

2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017, :406-409

← 1 2 3 4 5 →