Bonding of planar poly (methyl methacrylate) (PMMA) nanofluidic channels using thermal assisted ultrasonic bonding method

被引：9

作者：

Zhang, Zongbo ^{[1
]}

Luo, Yi ^{[2
]}

Wang, Xiaodong ^{[2
]}

He, Shengqiang ^{[3
]}

Meng, Fantao ^{[3
]}

Wang, Liding ^{[2
]}

机构：

[1] China Univ Petr E China, Coll Mech & Elect Engn, Qingdao, Shandong, Peoples R China

[2] Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian, Peoples R China

[3] Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2010年 / 16卷 / 12期

关键词：

FABRICATION;

D O I：

10.1007/s00542-010-1140-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Because of extremely small dimensions of nanochannels and low rigidity of polymer, most bonding techniques which are suitable for sealing polymer microscale channels (width and depth in tens to hundreds microns) are not competent for bonding of polymer nanochannels. In this study, a new thermal assisted ultrasonic bonding method for sealing poly (methyl methacrylate) (PMMA) nanochannels was presented. Substrates were preheated to 30-40A degrees C lower than glass transition temperature (T (g) ) of the material by hot plate. Then low amplitude ultrasonic vibration was employed to generate facial heat at the interface of the substrates. Influences of preheating temperature on bonding strength and dimension loss were studied. The nanochannels were successfully bonded with depth loss less than 5.3% (10.6 nm) and bonding strength of 0.21 J/cm(2) at the preheating temperature of 70A degrees C. Thermal assisted ultrasonic bonding is proven to be competent for bonding of polymer nanochannels with high bonding strength, low dimension loss and short bonding time.

引用

页码：2043 / 2048

页数：6

共 50 条

[41] THERMAL BLEACHING OF RHODAMINE-6G IN POLY(METHYL METHACRYLATE (PMMA)
HIGUCHI, F
MUTO, J
PHYSICS LETTERS A, 1981, 81 (01) : 95 - 96
[42] Thermal response of polystyrene/poly methyl methacrylate (PS/PMMA) polymeric blends
Mathur, Vishal
Sharma, Kananbala
HEAT AND MASS TRANSFER, 2016, 52 (12) : 2901 - 2911
[43] THERMAL-PROPERTIES OF A METHYL METHACRYLATE-BASED ORTHODONTIC BONDING ADHESIVE
RUEGGEBERG, FA
MAHER, FT
KELLY, MT
AMERICAN JOURNAL OF ORTHODONTICS AND DENTOFACIAL ORTHOPEDICS, 1992, 101 (04) : 342 - 349
[44] A simple solvent-assisted method for thermal bonding of large-surface, multilayer PMMA microfluidic devices
Madadi, Meisam
Madadi, Ali
Zareifar, Reza
Nikfarjam, Alireza
SENSORS AND ACTUATORS A-PHYSICAL, 2023, 349
[45] Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding
Mao, P
Han, JY
LAB ON A CHIP, 2005, 5 (08) : 837 - 844
[46] Effect of γ-irradiation on poly(methyl methacrylate) using an ultrasonic technique
Aziz, A.W., 1600,
[47] INTERFACIAL BONDING AND OPTICAL-TRANSMISSION FOR TRANSPARENT FIBERGLASS/POLY(METHYL METHACRYLATE) COMPOSITES
WEAVER, KD
STOFFER, JO
DAY, DE
POLYMER COMPOSITES, 1995, 16 (02) : 161 - 169
[48] Fabrication of 20 nm Shallow Nanofluidic Channels Using Coverslip Thin Glass-Glass Fusion Bonding Method
Kuo, Ju-Nan
Lin, Yi-Kai
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (09)
[49] Miscibility and hydrogen bonding in blends of poly(vinylphenol-co-methyl methacrylate) with poly(ethylene oxide)
Kuo, SW
Chang, FC
MACROMOLECULES, 2001, 34 (12) : 4089 - 4097
[50] Development of two step carbon dioxide assisted thermal fusion PMMA bonding process
Wu, Chia-Lin
Li, Chen-Chung
Lu, Chia-Fong
Yang, Sen-Yeu
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2012, 18 (04): : 409 - 414

← 1 2 3 4 5 →