[1] Tsinghua Univ, Dept Mech Engn, Beijing 100084, Peoples R China
[2] Shenzhen Univ, Coll Mechatron & Control Engn, Guangdong Prov Key Lab Micro Nano Optomechatron E, Shenzhen 518060, Peoples R China
[3] Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China
[4] Tsinghua Univ, Dept Aerosp Engn, Beijing 100084, Peoples R China
[5] Edith Cowan Univ, Sch Engn, 270 Joondalup Dr, Perth, WA 6027, Australia