Functionalization of cantilever array sensors using ink jet deposition

被引:0
作者
Bietsch, A [1 ]
Lang, KP [1 ]
Gerber, C [1 ]
Zhang, J [1 ]
Hegner, M [1 ]
机构
[1] Univ Basel, Natl Competence Ctr Res Nanosci, Inst Phys, CH-4056 Basel, Switzerland
来源
MICRONANO INTEGRATION | 2004年
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中图分类号
T [工业技术];
学科分类号
08 ;
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页码:115 / 116
页数:2
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