The effects of organic material-treated SiO2 dielectric surfaces on the electrical characteristics of inorganic amorphous In-Ga-Zn-O thin film transistors

被引:17
作者
Park, Mijeong [1 ]
Jang, Jaeyoung [1 ]
Park, Seonuk [1 ]
Kim, Jiye [1 ]
Seong, Jiehyun [2 ]
Hwang, Jiyoung [2 ]
Park, Chan Eon [1 ]
机构
[1] Pohang Univ Sci & Technol, Dept Chem Engn, Polymer Res Inst, Postech Organ Elect Lab, Pohang 790784, Gyungbuk, South Korea
[2] LG Chem Res Pk, Corp R&D, Taejon 305380, South Korea
关键词
SELF-ASSEMBLED MONOLAYERS; FIELD-EFFECT TRANSISTORS; OXIDE SEMICONDUCTORS;
D O I
10.1063/1.3691920
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the influence of organic dielectric surfaces on the electrical characteristics of inorganic amorphous indium-gallium-zinc oxide (a-IGZO)-based thin film transistors (TFTs). To modify the dielectric surface, various self-assembled monolayers and polymer thin films with different functional groups were introduced. Electrical measurements of the a-IGZO TFTs using surface-modified gate dielectrics revealed that the threshold voltages shifted toward positive values as the surface functional groups attract more electrons in the a-IGZO thin films. These results indicate that the channel conductance and carrier density of a-IGZO TFTs could be tuned by simple modification of the dielectric surfaces with organic materials. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3691920]
引用
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页数:4
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