Engineering the crystalline silicon surface by femtosecond laser processing in liquid: Hierarchical micro/nanostructure and amorphization

被引：5

作者：

Cao, Jing ^{[1
]}

Shen, Xingyu ^{[1
]}

Yu, Zhihao ^{[1
]}

Zheng, Junrong ^{[1
]}

机构：

[1] Peking Univ, Coll Chem & Mol Engn, Beijing 100871, Peoples R China

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2020年 / 248卷

基金：

中国国家自然科学基金;

关键词：

Black silicon; Topographical surface alterations; Femtosecond phenomena; Laser ablation in liquid; AMORPHOUS-SILICON; RAMAN; SI; FABRICATION; DYNAMICS; ABLATION; RIPPLES; ARRAYS;

D O I：

10.1016/j.matchemphys.2020.122909

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Hierarchical micro/nanostructure surface structures with different spatial characteristics are achieved after irradiation of crystalline silicon via femtosecond (fs) laser pulses (800 nm, 120 fs, 1 kHz) with the sample submerged in ethanol. According to laser pulse energy and fabrication parameters (such as scanning speed and superimposed writing), a characteristic morphology evolution of ovoid-like smooth modified area, ripple-like, wave-like, and coral-like micro/nanostructures is demonstrated, and the underline principle is discussed. The amorphization of fs laser-modified area is verified and investigated by Raman spectroscope. These modified structures have potential applications in sensors, silicon photovoltaic cells, and sterilization.

引用

页数：9

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