Design and transmittance measurement of the Ge1-xCx antireflection coatings

被引:0
作者
Zhan, Chang Yong [1 ]
Wang, Li Wu [1 ]
Dai, Hai Yang [1 ]
Huang, N. K. [1 ]
Wang, Jing Quan [2 ]
机构
[1] Sichuan Univ, Inst Nucl Sci & Technol, Educ Minist China, Key Lab Radiat & Technol, Chengdu 610064, Peoples R China
[2] Sichuan Univ, Nanophoton Lab, Chengdu 610064, Peoples R China
关键词
Ge1-xCx antireflection coatings; gradient index approach; MF or DC magnetron sputtering;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Ge1-xCx is used as high antireflection and protection coating on ZnS and ZnSe. Ge1-xCx coatings with a type of design of gradient index layers can be used in very broad bands. A technique combining medium frequency (MF) with direct-current (DC) magnetron reactive sputtering was used to deposit Ge1-xCx films based on our theoretical designs. The results according to experimental measurements show that the highest transmittance of Ge1-xCx coated on ZnSe slab can reach 94% at 8.5 mu m, to transmittance value above 80% can be obtained within the whole region of 5.8 - 12 mu m and an average transmittance of 82.4% can be obtained within the range of 2.3 - 14 mu m. The average transmittances of ZnSe slab deposited with Ge1-xCx are 20 - 30% higher than that of ZnSe in the corresponding band area.
引用
收藏
页码:S13 / S16
页数:4
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