UV-LIGHT DRIVEN PIEZOELECTRIC THIN-FILM ACTUATORS

被引：0

作者：

Kurokawa, F. ^{[1
]}

Oochi, Y. ^{[1
]}

Sadanda, A. ^{[1
]}

Tsujiura, Y. ^{[1
]}

Hida, H. ^{[1
]}

Kanno, I. ^{[1
]}

机构：

[1] Kobe Univ, Dept Mech Engn, Kobe, Hyogo, Japan

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Light-driven actuator; Photostrictive; Piezoelectric; Photovoltaic; Sputtering; Epitaxial; Thin film;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated UV-light driven micro-actuators utilizing epitaxial piezoelectric thin films. We prepared Pb(Zr,Ti)O-3 (PZT) epitaxial thin films on cantilever-shaped Pt/MgO substrates, and observed light-induced deformation. When the UV-LED light was irradiated to the surface of PZT thin film, the cantilever deflected due to the coupling of photovoltaic and piezoelectric properties. The deflection of the cantilever was proportionally increased with the UV-light intensity, while the time constant was less than 2 sec, which was much shorter than that of bulk ceramics. These results indicate that UV-light driven piezoelectric thin-film actuators will open a new avenue for remote controlled micro-actuators.

引用

页码：973 / 976

页数：4

共 14 条

[1] Competition between ferroelectric and semiconductor properties in Pb(Zr0.65Ti0.35)O3 thin films deposited by sol-gel [J].