Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations

被引:229
作者
Fukuda, T [1 ]
Arai, F [1 ]
Dong, LX [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Nagoya, Aichi 4648603, Japan
关键词
carbon nanotubes (CNTs); nanoassembly; nanodevices; nanorobotic manipulations;
D O I
10.1109/JPROC.2003.818334
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Properties and potential applications of carbon nanotubes are summarized by emphasizing the aspects of nanoelectronics and nanoelectromechanical systems (NEMS). The main technologies for the assembly of nanodevices through nanomanipulations with scanning probe microscopes and nanorobotic manipulators arc, overviewed, focusing on that of nanotubes. Key techniques for nanoassembly include the preparation of nano building blocks and. property characterization of them, the positioning of the building blocks with nanometer-scale resolution, and the connection of them. Nanorobotic manipulations, which are characterized by multiple degrees of freedom (DOFs) with both position and orientation control, independently actuated multiprobes, and a real-time observation system, are one of the most promising technologies,for assembling complex nanodevices in three-dimensional space. With a nano laboratory, a prototype nanomanufacturing system based on a 16-DOF nanorobotic manipulation system, the assembly of nanodevices with multiwalled carbon nonotubes are presented. Nanotube-based building, blocks are prepared by directly picking up, in situ property characterization, destructive fabrication, and shape modifications. Kinds of nanotube junctions, the fundamental elements for both nanoelectronics and NEMS, are constructed by positioning the building blocks together under the real-time observation with afield-emission scanning electron microscope, connecting them with naturally existing van der Waals forces, electron-beam-induced deposition, or mechanochemical bonding.
引用
收藏
页码:1803 / 1818
页数:16
相关论文
共 96 条
  • [1] Single-electron transistor made of two crossing multiwalled carbon nanotubes and its noise properties
    Ahlskog, M
    Tarkiainen, R
    Roschier, L
    Hakonen, P
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (24) : 4037 - 4039
  • [2] ARAI F, 1995, IROS '95 - 1995 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS: HUMAN ROBOT INTERACTION AND COOPERATIVE ROBOTS, PROCEEDINGS, VOL 2, P236, DOI 10.1109/IROS.1995.526166
  • [3] OBSERVATION OF A SINGLE-BEAM GRADIENT FORCE OPTICAL TRAP FOR DIELECTRIC PARTICLES
    ASHKIN, A
    DZIEDZIC, JM
    BJORKHOLM, JE
    CHU, S
    [J]. OPTICS LETTERS, 1986, 11 (05) : 288 - 290
  • [4] Carbon nanotubes: nanomechanics, manipulation, and electronic devices
    Avouris, P
    Hertel, T
    Martel, R
    Schmidt, T
    Shea, HR
    Walkup, RE
    [J]. APPLIED SURFACE SCIENCE, 1999, 141 (3-4) : 201 - 209
  • [5] MANIPULATION OF MATTER AT THE ATOMIC AND MOLECULAR-LEVELS
    AVOURIS, P
    [J]. ACCOUNTS OF CHEMICAL RESEARCH, 1995, 28 (03) : 95 - 102
  • [6] Logic circuits with carbon nanotube transistors
    Bachtold, A
    Hadley, P
    Nakanishi, T
    Dekker, C
    [J]. SCIENCE, 2001, 294 (5545) : 1317 - 1320
  • [7] Carbon nanotubes - the route toward applications
    Baughman, RH
    Zakhidov, AA
    de Heer, WA
    [J]. SCIENCE, 2002, 297 (5582) : 787 - 792
  • [8] Robotic nanomanipulation with a scanning probe microscope in a networked computing environment
    Baur, C
    Gazen, BC
    Koel, B
    Ramachandran, TR
    Requicha, AAG
    Zini, L
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (04): : 1577 - 1580
  • [9] COBALT-CATALYZED GROWTH OF CARBON NANOTUBES WITH SINGLE-ATOMIC-LAYERWALLS
    BETHUNE, DS
    KIANG, CH
    DEVRIES, MS
    GORMAN, G
    SAVOY, R
    VAZQUEZ, J
    BEYERS, R
    [J]. NATURE, 1993, 363 (6430) : 605 - 607
  • [10] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933