Two-dimensional hexagonal boron nitride as lateral heat spreader in electrically insulating packaging

被引:39
作者
Bao, Jie [1 ,2 ,3 ]
Edwards, Michael [4 ]
Huang, Shirong [1 ,2 ]
Zhang, Yong [1 ,2 ,4 ]
Fu, Yifeng [4 ,5 ]
Lu, Xiuzhen [1 ,2 ]
Yuan, Zhichao [1 ,2 ]
Jeppson, Kjell [1 ,2 ,4 ]
Liu, Johan [1 ,2 ,4 ]
机构
[1] Shanghai Univ, Sch Automat & Mech Engn, SMIT Ctr, Jiading Campus, Shanghai 201800, Peoples R China
[2] Shanghai Univ, Nanomicro Res Inst, Jiading Campus, Shanghai 201800, Peoples R China
[3] Huangshan Univ, Sch Mech & Elect Engn, Huangshan 245041, Peoples R China
[4] Chalmers Univ Technol, Dept Microtechnol & Nanosci, Elect Mat & Syst Lab, SE-41296 Gothenburg, Sweden
[5] SHT Smart High Tech AB, SE-41133 Gothenburg, Sweden
基金
中国国家自然科学基金;
关键词
boron nitride; thermal conduction; lateral heat spreader; electrical insulation; THERMAL MANAGEMENT; GRAPHENE; EXFOLIATION; CONDUCTIVITY;
D O I
10.1088/0022-3727/49/26/265501
中图分类号
O59 [应用物理学];
学科分类号
摘要
The need for electrically insulating materials with a high in-plane thermal conductivity for lateral heat spreading applications in electronic devices has intensified studies of layered hexagonal boron nitride (h-BN) films. Due to its physicochemical properties, h-BN can be utilised in power dissipating devices such as an electrically insulating heat spreader material for laterally redistributing the heat from hotspots caused by locally excessive heat flux densities. In this study, two types of boron nitride based heat spreader test structures have been assembled and evaluated for heat dissipation. The test structures separately utilised a few-layer h-BN film with and without graphene enhancement drop coated onto the hotspot test structure. The influence of the h-BN heat spreader films on the temperature distribution across the surface of the hotspot test structure was studied at a range of heat flux densities through the hotspot. It was found that the graphene-enhanced h-BN film reduced the hotspot temperature by about 8-10 degrees C at a 1000 W cm(-2) heat flux density, a temperature decrease significantly larger than for h-BN film without graphene enhancement. Finite element simulations of the h-BN film predict that further improvements in heat spreading ability are possible if the thermal contact resistance between the film and test chip are minimised.
引用
收藏
页数:9
相关论文
共 27 条
[1]   Superior thermal conductivity of single-layer graphene [J].
Balandin, Alexander A. ;
Ghosh, Suchismita ;
Bao, Wenzhong ;
Calizo, Irene ;
Teweldebrhan, Desalegne ;
Miao, Feng ;
Lau, Chun Ning .
NANO LETTERS, 2008, 8 (03) :902-907
[2]  
Balandin AA, 2011, NAT MATER, V10, P569, DOI [10.1038/nmat3064, 10.1038/NMAT3064]
[3]  
[鲍婕 Bao Jie], 2016, [应用基础与工程科学学报, Journal of Basic Science and Engineering], V24, P210
[4]   Synthesis and Applications of Two-Dimensional Hexagonal Boron Nitride in Electronics Manufacturing [J].
Bao, Jie ;
Jeppson, Kjell ;
Edwards, Michael ;
Fu, Yifeng ;
Ye, Lilei ;
Lu, Xiuzhen ;
Liu, Johan .
ELECTRONIC MATERIALS LETTERS, 2016, 12 (01) :1-16
[5]   Two-Dimensional Nanosheets Produced by Liquid Exfoliation of Layered Materials [J].
Coleman, Jonathan N. ;
Lotya, Mustafa ;
O'Neill, Arlene ;
Bergin, Shane D. ;
King, Paul J. ;
Khan, Umar ;
Young, Karen ;
Gaucher, Alexandre ;
De, Sukanta ;
Smith, Ronan J. ;
Shvets, Igor V. ;
Arora, Sunil K. ;
Stanton, George ;
Kim, Hye-Young ;
Lee, Kangho ;
Kim, Gyu Tae ;
Duesberg, Georg S. ;
Hallam, Toby ;
Boland, John J. ;
Wang, Jing Jing ;
Donegan, John F. ;
Grunlan, Jaime C. ;
Moriarty, Gregory ;
Shmeliov, Aleksey ;
Nicholls, Rebecca J. ;
Perkins, James M. ;
Grieveson, Eleanor M. ;
Theuwissen, Koenraad ;
McComb, David W. ;
Nellist, Peter D. ;
Nicolosi, Valeria .
SCIENCE, 2011, 331 (6017) :568-571
[6]   Application of through silicon via technology for in situ temperature monitoring on thermal interfaces [J].
Fu, Yifeng ;
Wang, Teng ;
Jonsson, Ove ;
Liu, Johan .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (02)
[7]   Thermal chemical vapor deposition grown graphene heat spreader for thermal management of hot spots [J].
Gao, Zhaoli ;
Zhang, Yong ;
Fu, Yifeng ;
Yuen, Matthew M. F. ;
Liu, Johan .
CARBON, 2013, 61 :342-348
[8]   Van der Waals heterostructures [J].
Geim, A. K. ;
Grigorieva, I. V. .
NATURE, 2013, 499 (7459) :419-425
[9]   Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride [J].
Jain, Nikhil ;
Durcan, Chris A. ;
Jacobs-Gedrim, Robin ;
Xu, Yang ;
Yu, Bin .
NANOTECHNOLOGY, 2013, 24 (35)
[10]   Graphene-Based Interconnects on Hexagonal Boron Nitride Substrate [J].
Jain, Nikhil ;
Bansal, Tanesh ;
Durcan, Christopher ;
Yu, Bin .
IEEE ELECTRON DEVICE LETTERS, 2012, 33 (07) :925-927