Research on an Anchor Point Lever Beam Coupling Type Tuning Fork Micro-gyroscope

This paper has designed an anchor point lever beam coupled tuning fork micro-gyroscope and tested its output performance. The tuning fork micro-gyro is designed to eliminate the output error caused by orthogonal coupling and in-phase-inverting coupling by structural decoupling and electrical decoupling, and can improve the anti-vibration performance and the modal optimization ability. It has derived the dynamic response working model of the non-ideal tuning fork micro-gyroscope, and optimized the structural parameters of the micro-gyroscope by simulation analysis. The microstructure processing has been realized by the SOI-MEMS process, sealed the processed structural prototype, and tested the performance through the established experimental system. According to the test results, the designed micro-gyroscope driving direction has greatly reduced the in-phase-inverting coupling through the anchor coupling lever beam, and the detection direction effectively suppressed the in-phase-inverting coupling through the stiffness matching electrode. While closed-loop detecting, the measured Aallan variance zero-bias stability is 1.779 degrees/h, and the 1 sigma zero-bias stability is 8.3 degrees/h. While applying a stiffness matching voltage, the measured vibration sensitivity is 23.9 degrees/h/g.