Suppression of boron-oxygen defects in p-type Czochralski silicon by germanium doping (vol 97, 051903, 2010)

被引:0
作者
Yu, Xuegong [1 ]
Wang, Peng [1 ]
Chen, Peng [1 ]
Li, Xiaoqiang [1 ]
Yanga, Deren [1 ]
机构
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
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D O I
10.1063/1.3483301
中图分类号
O59 [应用物理学];
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页数:1
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[1]   Suppression of boron-oxygen defects in p-type Czochralski silicon by germanium doping [J].
Yu, Xuegong ;
Wang, Peng ;
Chen, Peng ;
Li, Xiaoqiang ;
Yang, Deren .
APPLIED PHYSICS LETTERS, 2010, 97 (05)