OPTICAL PROPERTIES OF NANO-STRUCTURE TUNGSTEN-DOPED VANADIUM OXIDE

被引：0
作者：
Cai, W. B. [1 ]
Wang, F. [1 ]
Miao, Y. P. [1 ]
Wei, J. [1 ,2 ]
Zhang, K. L. [1 ]
机构：
[1] Tianjin Univ Technol, Sch Elect Informat Engn, Tianjin 300384, Peoples R China
[2] Singapore Inst Mfg Technol, Singapore 638075, Singapore
来源：
INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B | 2013年
关键词：
VOX THIN-FILMS; TEMPERATURE; FABRICATION; TRANSITION;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Tungsten-doped vanadium oxide has been proved to decrease the transition temperature, which enables vanadium oxide film to be more promising. Besides, the nano-structure can improve the properties of the film when compared with the as-deposited film. In this letter, a nano-structure tungsten-doped vanadium oxide film is proposed. Tungsten-doped vanadium oxide film was deposited on the Si (400) substrate by DC magnetron sputtering. The doping level was controlled by adjusting the sputtering time. Then the as-deposited film was annealed to form a nano-structure film at the temperature of 500 C for 1 h in high vacuum. The morphology and crystalline structure of such films were characterized by AFM and XRD, respectively. Optical properties of the films were tested by FTIR, mainly comparing the infrared transmission before and after annealing.
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页码：859 / 862
页数：4
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