Nucleation and growth mechanism of sequential electroplating of gold over thick tin layer have been studied by SEM, EDX and X-ray diffraction method. It is found that the growth mechanism of Au layer on top of Sn layer is diffusion-controlled process and the primal Au-Sn intermetallic compound and An phases are AuSn4(211) and Au(111), respectively. The plated gold atoms nucleate and form clusters on the ridges of tin grains. The average size of Au spheres forming the clusters depends on plating time: 0.4 mum for 1 min, 1 mum for 7 min, and 3 mum for 13 min. The equivalent An layer thickness is 0.2 mum, 1.0 mum, and 2.0 mum, respectively. As plating process continues, Au atoms are deposited over the Au spheres already formed rather than generate more nucleation sites on the tin surface. As a result, the Au spheres grow in size and merge each other to form larger clusters. The fundamental understanding of the nucleation and growth mechanism is important in guiding the design of plating processes to produce Au-Sn composites for lead-free soldering based on AuSn alloys without using flux. (C) 2004 Elsevier B.V. All rights reserved.