A portable MEMS Coriolis mass flow sensor

被引：0
作者：
Sparks, D [1 ]
Smith, R [1 ]
Cripe, J [1 ]
Schneider, R [1 ]
Najafi, N [1 ]
机构：
[1] Integrated Sensing Syst Inc, Ypsilanti, MI 48198 USA
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
MEMS; Coriolis; flow sensor; micromachine; vacuum; packaging; getter; nanogetter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a micromachined Coriolis mass flow sensor is described. Key to portability, this resonant silicon sensor is vacuum packaged at the chip-level. A new MEMS gettering method was developed to accomplish high-vacuum packaging. Fluids flow through machined silicon microtubes. The tubes are driven electrostatically and monitored capacitively. Test data and applications are presented.
引用
收藏
页码：337 / 339
页数：3
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