A portable MEMS Coriolis mass flow sensor

被引：0
|
作者：
Sparks, D [1 ]
Smith, R [1 ]
Cripe, J [1 ]
Schneider, R [1 ]
Najafi, N [1 ]
机构：
[1] Integrated Sensing Syst Inc, Ypsilanti, MI 48198 USA
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
MEMS; Coriolis; flow sensor; micromachine; vacuum; packaging; getter; nanogetter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a micromachined Coriolis mass flow sensor is described. Key to portability, this resonant silicon sensor is vacuum packaged at the chip-level. A new MEMS gettering method was developed to accomplish high-vacuum packaging. Fluids flow through machined silicon microtubes. The tubes are driven electrostatically and monitored capacitively. Test data and applications are presented.
引用
收藏
页码：337 / 339
页数：3
相关论文
共 50 条
  • [1] A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications
    Smith, Richard
    Sparks, Douglas R.
    Riley, Diane
    Najafi, Nader
    IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2009, 56 (04) : 1066 - 1071
  • [2] μ-Coriolis Mass Flow Sensor with Resistive Readout
    Schut, Thomas
    Wiegerink, Remco
    Lotters, Joost
    MICROMACHINES, 2020, 11 (02)
  • [3] Optimization of a micro Coriolis mass flow sensor
    Groenesteijn, J.
    Lammerink, T. S. J.
    Wiegerink, R. J.
    Haneveld, J.
    Lotters, J. C.
    EUROSENSORS XXV, 2011, 25
  • [4] A coriolis mass flow sensor structure in silicon
    Enoksson, P
    Stemme, G
    Stemme, E
    NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 156 - 161
  • [5] μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor
    Schut, T. V. P.
    Wiegerink, R. J.
    Lotters, J. C.
    MICROELECTRONIC ENGINEERING, 2020, 226
  • [6] Parametric excitation of a micro Coriolis mass flow sensor
    Droogendijk, H.
    Groenesteijn, J.
    Haneveld, J.
    Sanders, R. G. P.
    Wiegerink, R. J.
    Lammerink, T. S. J.
    Lotters, J. C.
    Krijnen, G. J. M.
    APPLIED PHYSICS LETTERS, 2012, 101 (22)
  • [7] Highly sensitive micro coriolis mass flow sensor
    Haneveld, J.
    Lammerink, T. S. J.
    Dikstra, M.
    Droogendijk, H.
    de Boer, M. J.
    Wiegerink, R. J.
    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 920 - 923
  • [8] μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout
    Schut, Thomas V. P.
    Wiegerink, Remco J.
    Lotters, Joost C.
    IEEE SENSORS JOURNAL, 2021, 21 (05) : 5886 - 5894
  • [9] Parametric amplification in a micro Coriolis mass flow sensor
    Groenesteijn, J.
    Droogendijk, H.
    Wiegerink, R. J.
    Lammerink, T. S. J.
    Lotters, J. C.
    Sanders, R. G. P.
    Krijnen, G. J. M.
    JOURNAL OF APPLIED PHYSICS, 2014, 115 (19)
  • [10] Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor
    Hu, Chun
    Zheng, Dezhi
    Fan, Shangchun
    Wiegerink, Remco John
    Guo Zhanshe
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (04): : 747 - 755
12345