Nitrogen dioxide sensing properties of sprayed tungsten oxide thin film sensor: Effect of film thickness

被引：54

作者：

Ganbavle, V. V. ^{[1
]}

Mohite, S. V. ^{[1
]}

Agawane, G. L. ^{[2
]}

Kim, J. H. ^{[2
]}

Rajpure, K. Y. ^{[1
]}

机构：

[1] Shivaji Univ, Dept Phys, Electrochem Mat Lab, Kolhapur 416004, MS, India

[2] Chonnam Natl Univ, Dept Mat Sci & Engn, Kwangju 500757, South Korea

来源：

JOURNAL OF COLLOID AND INTERFACE SCIENCE | 2015年 / 451卷

关键词：

NO2; sensor; WO3; Spray pyrolysis; XPS; Photoluminescence; Selectivity; SUBSTRATE-TEMPERATURE; GAS SENSORS; DEPENDENCE; REDUCTION; NANOWIRES; MECHANISM; BEHAVIOR; SURFACE;

D O I：

10.1016/j.jcis.2015.04.001

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We report a study on effect of film thickness on NO2 sensing properties of sprayed WO3 thin films. WO3 thin films varying in thicknesses are deposited onto the glass substrates by simple spray pyrolysis technique by varying the volume of spray solution. Thin film gas sensors are characterized by using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), atomic force microscopy (AFM) and photoluminescence (PL) techniques to study their physical properties. Film having thickness 745 nm has shown highest gas response of 97% with 12 and 412 s response and recovery times, respectively towards 100 ppm NO2 concentration. Gas response of 20% is observed towards 10 ppm NO2 at 200 degrees C operating temperature. Sensitivity of the optimal sensor is 0.83%/ppm when operating at 200 degrees C with 10 ppm lower detection limit. The response of the sensor is reproducible and WO3 films are highly selective towards NO2 in presence of mist of various interfering gases viz. H2S, NH3, LPG, CO and SO2. (C) 2015 Elsevier Inc. All rights reserved.

引用

页码：245 / 254

页数：10

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