共 12 条
- [2] Monte Carlo simulation of high-energy electron beam exposure in resist HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION, 2005, 29 (12): : 1219 - 1224
- [5] Monte Carlo calculated beam quality correction factors for high energy electron beams PHYSICA MEDICA-EUROPEAN JOURNAL OF MEDICAL PHYSICS, 2024, 117
- [7] Monte Carlo calculated beam quality correction factors for high energy photon and electron fields PHYSICA MEDICA-EUROPEAN JOURNAL OF MEDICAL PHYSICS, 2025, 131
- [9] Optimization of low-energy electron beam proximity lithography stencil mask structure factors by Monte Carlo simulation JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (03): : 1196 - 1198