Bonding, exposing and transferring technique in SU-8 and SU-8 laser micromachining combination for 3D, free-standing and multilevel microstructures

被引：1

作者：

Medina, D. ^{[1
]}

Perdigones, F. ^{[1
]}

Garcia, J. ^{[1
]}

Luque, A. ^{[1
]}

Quero, J. M. ^{[1
]}

机构：

[1] Univ Seville, Dept Ingn Elect, Escuela Super Ingn, Seville, Spain

来源：

MICRO & NANO LETTERS | 2012年 / 7卷 / 05期

关键词：

INTERFERENCE LITHOGRAPHY; EMBEDDED MICROCHANNELS; MICROFLUIDIC DEVICES; NEGATIVE RESIST; FABRICATION; MEMS;

D O I：

10.1049/mnl.2012.0124

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This Letter reports a simple laser process to fabricate three-dimensional, free-standing and multilevel polymeric (SU-8) microstructures using a nanoseconds neodymium-doped yttrium aluminium garnet (Nd:YAG) laser. The proposed process is intended to be a complement for the bonding, exposing and transferring technique in SU-8 (BETTS) process in MEMS applications. Thanks to this technique, BETTS-laser micromachining, the fabrication of free-standing 3D SU-8 microstructures can be performed, decreasing the number of steps of the typical SU-8 process. Furthermore, it improves the aspect ratio of BETTS-based planar microstructures, and also allows the fabrication of 3D microstructures which are not possible to fabricate using BETTS, or the typical SU-8 process. To prove the viability of BETTS-laser micromachining process, several microstructures have successfully been fabricated.

引用

页码：412 / 414

页数：3