Design and fabrication of micro-windmill for fluidic media based on SU-8 for using flow-meter

被引：0
|
作者：
Alirezaei, I. Sabri [1 ]
Ghaderi, M. [1 ]
Khalafi, M. [1 ]
Latifi, H. [1 ]
机构：
[1] Shahid Beheshti Univ, Laser & Plasma Res Inst, Tehran 1983963113, Iran
来源：
MICRO-OPTICS 2012 | 2012年 / 8428卷
关键词：
Micro-; windmill; Flow-meter; UV-Lithography; SU-8; Photoresist;
D O I：
10.1117/12.922044
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we have introduced a method for design and fabrication of a micro-windmill based on SU-8 photoresist that is rotated by gas flow. This device is used for measuring gas flow by assessment of rotational speed of the micro-windmill. The flow-meter sensitivity is influenced by different parameters such as number of blades and dimension of the windmills. Therefore, we have tried to experimentally reduce the dimensions and increase of the number of blades to obtain the higher sensitivity in measuring gas flow. An experimental setup is arranged to measure the rotational frequency of the windmill as a function of gas flow with optical methods.
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页数：9
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