Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges

Comparative studies of capacitively coupled radio-frequency discharges in helium and argon at pressures between 10 and 80 Pa are presented applying two different fluid modeling approaches as well as two independently developed particle-in-cell/Monte Carlo collision (PIC/MCC) codes. The focus is on the analysis of the range of applicability of a recently proposed fluid model including an improved drift-diffusion approximation for the electron component as well as its comparison with fluid modeling results using the classical drift-diffusion approximation and benchmark results obtained by PIC/MCC simulations. Main features of this time- and space-dependent fluid model are given. It is found that the novel approach shows generally quite good agreement with the macroscopic properties derived by the kinetic simulations and is largely able to characterize qualitatively and quantitatively the discharge behavior even at conditions when the classical fluid modeling approach fails. Furthermore, the excellent agreement between the two PIC/MCC simulation codes using the velocity Verlet method for the integration of the equations of motion verifies their accuracy and applicability.