Low noise and high photodetection probability SPAD in 180 nm standard CMOS technology

被引:10
|
作者
Accarino, Claudio [1 ]
Al-Rawhani, Mohammed [1 ]
Shah, Yash Diptesh [1 ]
Maneuski, Dzmitry [1 ]
Mitra, Srinjoy [1 ]
Buttar, Craig [1 ]
Cumming, David R. S. [1 ]
机构
[1] Univ Glasgow, Coll Sci & Engn, Glasgow, Lanark, Scotland
基金
英国工程与自然科学研究理事会;
关键词
single photon avalanche diode; SPAD; CMOS; low-light (vision); photo detector; image sensor; PHOTON AVALANCHE-DIODE;
D O I
10.1109/ISCAS.2018.8351173
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A square shaped, low noise and high photo-response single photon avalanche diode suitable for circuit integration, implemented in a standard CMOS 180 nm high voltage technology, is presented. In this work, a p+ to shallow n-well junction was engineered with a very smooth electric field profile guard ring to attain a photo detection probability peak higher than 50% with a median dark count rate lower than 2 Hz/mu m(2) when operated at an excess bias of 4 V. The reported timing jitter full width at half maximum is below 300 ps for 640 nm laser pulses.
引用
收藏
页数:4
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