Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application

被引：147
作者：
Korotcenkov, G
Brinzari, V
Schwank, J
DiBattista, M
Vasiliev, A
机构：
[1] Tech Univ Moldova, Dept Microelect, Kishinev 2004, MD, Moldova
[2] Univ Michigan, Dept Chem Engn, Ann Arbor, MI 48109 USA
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期
关键词：
SnO2; films; spray pyrolysis; structure; gas sensitivity;
D O I：
10.1016/S0925-4005(01)00741-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The analysis of the influence of deposition modes on the structure, electrical and gas sensitivity characteristics of SnO2 films, deposited by spray pyrolysis, is presented in this report. X-ray diffraction (XRD), scanning electron microscopy (SEM) and laser ellipsometry were used for this purpose. It was determined that nano-size polycrystalline SnO2 films with thickness > 30 nm can have different structure in dependence on pyrolysis temperature and film thickness. Ultra-thin SnO2 films with thickness d < 20 nm are discontinuous. The relation between structure of the films and gas sensitivity properties is discussed. The explanation of observed effects was made. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：244 / 252
页数：9
相关论文
共 34 条
[1]   THIN-LAYERS DEPOSITED BY THE PYROSOL PROCESS [J].
BLANDENET, G ;
COURT, M ;
LAGARDE, Y .
THIN SOLID FILMS, 1981, 77 (1-3) :81-90
[2]   Pd-doped SnO2 thin films deposited by assisted ultrasonic spraying CVD for gas sensing:: selectivity and effect of annealing [J].
Briand, D ;
Labeau, M ;
Currie, JF ;
Delabouglise, G .
SENSORS AND ACTUATORS B-CHEMICAL, 1998, 48 (1-3) :395-402
[3]  
BRINZARI V, 2000, CD P INT C EUR 14 CO, P369
[4]  
BRINZARI V, 1999, P SOC PHOTO-OPT INS, V3857, P186
[5]  
BRINZARI V, 2000, P SEM INT C CAS 2000, V1, P127
[6]   TIN DIOXIDE THIN-FILM GAS SENSOR PREPARED BY CHEMICAL-VAPOR-DEPOSITION - INFLUENCE OF GRAIN-SIZE AND THICKNESS ON THE ELECTRICAL-PROPERTIES [J].
BRUNO, L ;
PIJOLAT, C ;
LALAUZE, R .
SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) :195-199
[7]   Simulation of thin film gas sensors kinetics [J].
Brynzari, V ;
Korotchenkov, G ;
Dmitriev, S .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 61 (1-3) :143-153
[8]  
Brynzari V., 2000, J ELECT TECHNOL, V33, P225
[9]  
BRYNZARI V, 1997, P 9 INT C SOL STAT S, P983
[10]  
DEXIVRY EO, 1987, HIGH TECH CERAMICS, P1709
1234