Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application

被引：145
作者：
Korotcenkov, G
Brinzari, V
Schwank, J
DiBattista, M
Vasiliev, A
机构：
[1] Tech Univ Moldova, Dept Microelect, Kishinev 2004, MD, Moldova
[2] Univ Michigan, Dept Chem Engn, Ann Arbor, MI 48109 USA
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期
关键词：
SnO2; films; spray pyrolysis; structure; gas sensitivity;
D O I：
10.1016/S0925-4005(01)00741-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The analysis of the influence of deposition modes on the structure, electrical and gas sensitivity characteristics of SnO2 films, deposited by spray pyrolysis, is presented in this report. X-ray diffraction (XRD), scanning electron microscopy (SEM) and laser ellipsometry were used for this purpose. It was determined that nano-size polycrystalline SnO2 films with thickness > 30 nm can have different structure in dependence on pyrolysis temperature and film thickness. Ultra-thin SnO2 films with thickness d < 20 nm are discontinuous. The relation between structure of the films and gas sensitivity properties is discussed. The explanation of observed effects was made. (C) 2001 Elsevier Science B.V. All rights reserved.
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收藏
页码：244 / 252
页数：9
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