Microscopic sensors using optical wireless integrated circuits

被引：53

作者：

Cortese, Alejandro J. ^{[1
]}

Smart, Conrad L. ^{[1
]}

Wang, Tianyu ^{[2
]}

Reynolds, Michael F. ^{[1
]}

Norris, Samantha L. ^{[1
]}

Ji, Yanxin ^{[3
]}

Lee, Sunwoo ^{[3
]}

Mok, Aaron ^{[2
]}

Wu, Chunyan ^{[2
]}

Xia, Fei ^{[2
]}

Ellis, Nathan I. ^{[1
]}

Molnar, Alyosha C. ^{[3
,4
]}

Xu, Chris ^{[2
,4
]}

McEuen, Paul L. ^{[1
,4
]}

机构：

[1] Cornell Univ, Lab Atom & Solid State Phys, Ithaca, NY 14853 USA

[2] Cornell Univ, Appl & Engn Phys, Ithaca, NY 14853 USA

[3] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[4] Cornell Univ, Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

来源：

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA | 2020年 / 117卷 / 17期

基金：

美国国家科学基金会;

关键词：

sensor; microscopic; microfabrication; POWER TRANSFER;

D O I：

10.1073/pnas.1919677117

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic micro-light emitting diodes (LEDs) into a 100-mu m-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in similar to 10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.

引用

页码：9173 / 9179

页数：7

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