Microscopic sensors using optical wireless integrated circuits

被引：48

作者：

Cortese, Alejandro J. ^{[1
]}

Smart, Conrad L. ^{[1
]}

Wang, Tianyu ^{[2
]}

Reynolds, Michael F. ^{[1
]}

Norris, Samantha L. ^{[1
]}

Ji, Yanxin ^{[3
]}

Lee, Sunwoo ^{[3
]}

Mok, Aaron ^{[2
]}

Wu, Chunyan ^{[2
]}

Xia, Fei ^{[2
]}

Ellis, Nathan I. ^{[1
]}

Molnar, Alyosha C. ^{[3
,4
]}

Xu, Chris ^{[2
,4
]}

McEuen, Paul L. ^{[1
,4
]}

机构：

[1] Cornell Univ, Lab Atom & Solid State Phys, Ithaca, NY 14853 USA

[2] Cornell Univ, Appl & Engn Phys, Ithaca, NY 14853 USA

[3] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[4] Cornell Univ, Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

来源：

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA | 2020年 / 117卷 / 17期

基金：

美国国家科学基金会;

关键词：

sensor; microscopic; microfabrication; POWER TRANSFER;

D O I：

10.1073/pnas.1919677117

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic micro-light emitting diodes (LEDs) into a 100-mu m-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in similar to 10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.

引用

页码：9173 / 9179

页数：7

共 34 条

[1] Agarwal Kush, 2017, IEEE Rev Biomed Eng, V10, P136, DOI 10.1109/RBME.2017.2683520
[2] Internet of Things: A Survey on Enabling Technologies, Protocols, and Applications
Al-Fuqaha, Ala
Guizani, Mohsen
Mohammadi, Mehdi
Aledhari, Mohammed
Ayyash, Moussa
[J]. IEEE COMMUNICATIONS SURVEYS AND TUTORIALS, 2015, 17 (04): : 2347 - 2376
[3] A Photovoltaic-Driven and Energy-Autonomous CMOS Implantable Sensor
Ayazian, Sahar
Akhavan, Vahid A.
Soenen, Eric
Hassibi, Arjang
[J]. IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, 2012, 6 (04) : 336 - 343
[4] A Fully-Integrated, Miniaturized (0.125 mm2) 10.5 μW Wireless Neural Sensor
Biederman, William
Yeager, Daniel J.
Narevsky, Nathan
Koralek, Aaron C.
Carmena, Jose M.
Alon, Elad
Rabaey, Jan M.
[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2013, 48 (04) : 960 - 970
[5] A mm-Sized Implantable Medical Device (IMD) With Ultrasonic Power Transfer and a Hybrid Bi-Directional Data Link
Charthad, Jayant
Weber, Marcus J.
Chang, Ting Chia
Arbabian, Amin
[J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2015, 50 (08) : 1741 - 1753
[6] Chen G., 2011, 2011 IEEE International Solid-State Circuits Conference (ISSCC 2011), P310, DOI 10.1109/ISSCC.2011.5746332
[7] Mass fabrication and delivery of 3D multilayer μTags into living cells
Chen, Lisa Y.
Parizi, Kokab B.
Kosuge, Hisanori
Milaninia, Kaveh M.
McConnell, Michael V.
Wong, H. -S. Philip
Poon, Ada S. Y.
[J]. SCIENTIFIC REPORTS, 2013, 3
[8] Cell detection and counting through cell lysate impedance spectroscopy in microfluidic devices
Cheng, Xuanhong
Liu, Yi-shao
Irimia, Daniel
Demirci, Utkan
Yang, Liju
Zamir, Lee
Rodriguez, William R.
Toner, Mehmet
Bashir, Rashid
[J]. LAB ON A CHIP, 2007, 7 (06) : 746 - 755
[9] Flamm K., 2018, WORKING PAPER
[10] Noninvasive glucose detection in human skin using wavelength modulated differential laser photothermal radiometry
Guo, Xinxin
Mandelis, Andreas
Zinman, Bernard
[J]. BIOMEDICAL OPTICS EXPRESS, 2012, 3 (11): : 3012 - 3021

← 1 2 3 4 →