Improvement of electrical properties of printed ITO thin films by heat-treatment conditions

被引：16

作者：

Hong, Sung-Jei ^{[1
]}

Kim, Jong-Woong ^{[1
]}

Han, Jeong In ^{[2
]}

机构：

[1] Korea Elect Technol Inst, Display Components & Mat Res Ctr, Songnam 463816, Gyeonggi Do, South Korea

[2] Dongguk Univ Seoul, Dept Chem & Biochem Engn, Seoul 100715, South Korea

来源：

CURRENT APPLIED PHYSICS | 2011年 / 11卷 / 01期

关键词：

ITO ink; Inkjet printing; Post heat-treatment; Sheet resistance; Optical transmittance; INK; NANOPARTICLE;

D O I：

10.1016/j.cap.2010.11.081

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, electrical properties of an indium tin oxide(ITO) thin film fabricated by inkjet printing were improved by optimizing the post heat-treatment conditions. For inkjet printing, 10, 20, and 30 wt% ITO inks were formulated, and they ITO inks were printed onto glass substrate. Then, the printed ITO thin films were heated at 300, 400, 500, and 600 degrees C under several atmospheric conditions of single step of N-2, air and combination steps using the gases, respectively. As a result, the sheet resistance of the printed ITO thin film was decreased as the concentration of ITO ink and heat-treatment temperature were increased under single step of N-2 atmosphere. In the case of the printed ITO thin film using 30 wt% ITO ink and heat-treatment at 600 degrees C under a N-2 atmosphere, the improved sheet resistance and optical transmittance of 455 Omega/square and 90%, respectively, were achieved. (c) 2010 Elsevier B.V. All rights reserved.

引用

页码：S202 / S205

页数：4

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