Impact of sensor packaging on analytical performance and power consumption of metal oxide based gas sensor microarrays

被引：3
作者：
Gmuer, R.
Goschnick, J.
Hocker, T.
Schwarzenbach, H.
Sommerb, M.
机构：
[1] Forschungszentrum Karlsruhe, Inst Mikrostrukturtech, D-76344 Eggenstein Leopoldshafen, Germany
[2] Zurcher Hochschule Winterthur, Ctr Computat Phys, D-8401 Winterthur, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 127卷 / 01期
关键词：
metal oxide gas-sensing; packaging; finite-elements model calculation;
D O I：
10.1016/j.snb.2007.07.139
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The analytical performance and the power consumption of gas sensor microarrays belong to the most prominent properties governing the applicability. Packaging of sensor systems is often underestimated in its essential influence. Measurements and finite-element model calculations of the heat dissipation and gas fluidics have been performed to optimize the periphery of an SnO2 equipped gradient gas sensor microarray operated at 300 degrees C. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：107 / 111
页数：5
相关论文
共 4 条
[1]   An electronic nose for intelligent consumer products based on a gas analytical gradient microarray [J].
Goschnick, J .
MICROELECTRONIC ENGINEERING, 2001, 57-8 :693-704
[2]  
GOSCHNICK J, 2003, ELMINA ELEKTRONISCHE
[3]  
*NM MUM MOD GMBH N, 2006, US MAN
[4]   CONDUCTANCE, WORK FUNCTION AND CATALYTIC ACTIVITY OF SNO2-BASED GAS SENSORS [J].
SCHIERBAUM, KD ;
WEIMAR, U ;
GOPEL, W ;
KOWALKOWSKI, R .
SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) :205-214
1