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- [22] A 193 nm microscope for CD metrology for the 32nm node and beyond26TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE, 2010, 7545Bodermann, Bernd论文数: 0 引用数: 0 h-index: 0机构: Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany Phys Tech Bundesanstalt, D-38116 Braunschweig, GermanyLi, Zhi论文数: 0 引用数: 0 h-index: 0机构: Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany Phys Tech Bundesanstalt, D-38116 Braunschweig, GermanyPilarski, Frank论文数: 0 引用数: 0 h-index: 0机构: Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany Phys Tech Bundesanstalt, D-38116 Braunschweig, GermanyBergmann, Detlef论文数: 0 引用数: 0 h-index: 0机构: Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
- [23] 32nm node USJ implant & annealing options15TH IEEE INTERNATIONAL CONFERENCE ON ADVANCED THERMAL PROCESSING OF SEMICONDUCTORS - RTP 2007, 2007, : 181 - +Borland, John O.论文数: 0 引用数: 0 h-index: 0机构: JOB Technol, 98 1204 Kuawa St, Aiea, HI USA JOB Technol, 98 1204 Kuawa St, Aiea, HI USA
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- [25] New constraint for Vth optimization for sub 32nm node CMOS gates scalingIEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST, 2005, : 1049 - 1052Morifuji, E论文数: 0 引用数: 0 h-index: 0机构: Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USA Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USAKapur, P论文数: 0 引用数: 0 h-index: 0机构: Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USA Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USAChao, AKA论文数: 0 引用数: 0 h-index: 0机构: Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USA Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USANishi, Y论文数: 0 引用数: 0 h-index: 0机构: Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USA Stanford Univ, Dept Elect Engn, Ctr Integrated Syst, Stanford, CA 94305 USA
- [26] Device Scaling of High Performance MOSFET with Metal Gate High-K at 32nm Technology Node and BeyondSISPAD: 2008 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES, 2008, : 309 - +Wang, Xinlin论文数: 0 引用数: 0 h-index: 0机构: IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USA IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USAShahidi, Ghavam论文数: 0 引用数: 0 h-index: 0机构: IBM Res Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY USA IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USAOldiges, Phil论文数: 0 引用数: 0 h-index: 0机构: IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USA IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USAKhare, Mukesh论文数: 0 引用数: 0 h-index: 0机构: IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USA IBM Semicond Res & Dev Ctr, Syst & Technol Grp, Hopewell Jct, NY 12533 USA
- [27] Patterning Performance of Hyper NA Immersion Lithography for 32nm Node Logic ProcessLITHOGRAPHY ASIA 2008, 2008, 7140Takahata, Kazuhiro论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanKajiwara, Masanari论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanKitamura, Yosuke论文数: 0 引用数: 0 h-index: 0机构: Semicon Co, Syst LSI Div 1, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanOjima, Tomoko论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanSatake, Masaki论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanFujise, Hiroharu论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanSeino, Yuriko论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanEma, Tatsuhiko论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanTakakuwa, Manabu论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanNakagawa, Shinichiro论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanKono, Takuya论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanAsano, Masafumi论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanKyo, Suigen论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn 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Technol, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanHasegawa, Shunsuke论文数: 0 引用数: 0 h-index: 0机构: Semicon Co, Syst LSI Div 1, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanMiyashita, Katsura论文数: 0 引用数: 0 h-index: 0机构: Semicon Co, Syst LSI Div 1, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanMurakami, Takashi论文数: 0 引用数: 0 h-index: 0机构: NEC Elect Corp, Prod Technol Div, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanNagahara, Seiji论文数: 0 引用数: 0 h-index: 0机构: NEC Elect Corp, Prod Technol Div, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanTakeda, Kazuhiro论文数: 0 引用数: 0 h-index: 0机构: NEC Elect Corp, Prod Technol Div, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanMimotogi, Shoji论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, JapanInoue, Soichi论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan Semicond Co, Toshiba Corp, Pro & Mfg Engn Ctr, Tokyo, Japan Toshiba Co Ltd, Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Shinsugita Cho, Yokohama, Kanagawa 2358522, Japan
- [28] Patterning strategy and performance of 1.3NA tool for 32nm node lithographyOPTICAL MICROLITHOGRAPHY XXI, PTS 1-3, 2008, 6924Mimotogi, Shoji论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanSatake, Masaki论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanKitamura, Yosuke论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Syst LSI Div 1, Isogo Ku, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanTakahata, Kazuhiro论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanKodera, Katsuyoshi论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanFujise, Hiroharu论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanEma, Tatsuhiko论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanSho, Koutaro论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanIshigo, Kazutaka论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanKono, Takuya论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanAsano, Masafumi论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanYoshida, Kenji论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanKanai, Hideki论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanKyoh, Suigen论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanHarakawa, Hideaki论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanNomachi, Akiko论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanIshida, Tatsuya论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Adv CMOS Technol Dept, SoC Res & Dev Ctr, Isogo Ku, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanMiyashita, Katsura论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Syst LSI Div 1, Isogo Ku, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, JapanInoue, Soichi论文数: 0 引用数: 0 h-index: 0机构: TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan TOSHIBA CORP Semicond Co, Proc & Mfg Engn Ctr, Isogo Ku, 8 Sinsugita Cho, Yokohama, Kanagawa 2358522, Japan
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- [30] Lithography Options for the 32nm Half Pitch Node and BeyondPROCEEDINGS OF THE IEEE 2008 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2008, : 371 - 378Ronse, K.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumJansen, Ph.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumGronheid, R.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumHendrickx, E.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumMaenhoudt, M.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumGoethals, M.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, BelgiumVandenberghe, G.论文数: 0 引用数: 0 h-index: 0机构: IMEC, B-3001 Louvain, Belgium IMEC, B-3001 Louvain, Belgium