共 50 条
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- [2] Stress Engineering for 32nm CMOS Technology Node 2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4, 2008, : 113 - 116
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- [5] 32nm node technology development using interference immersion lithography Advances in Resist Technology and Processing XXII, Pt 1 and 2, 2005, 5753 : 491 - 501
- [6] Multi-gate devices for the 32nm technology node and beyond ESSDERC 2007: PROCEEDINGS OF THE 37TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, 2007, : 143 - +
- [7] The optimization of low power operation SRAM circuit for 32nm node SISPAD 2007: SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2007, 2007, : 397 - 400
- [8] Extending immersion lithography to the 32nm node OPTICAL MICROLITHOGRAPHY XX, PTS 1-3, 2007, 6520
- [10] MoSi absorber photomask for 32nm node PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY XV, PTS 1 AND 2, 2008, 7028