Design and performance analysis of thermally actuated MEMS circuit breakers

被引：5
|
作者：
Yeatman, EM [1 ]
机构：
[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2AZ, England
[2] Microsaic Syst Ltd, Surrey GU21 5BX, England
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2005年 / 15卷 / 07期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1088/0960-1317/15/7/016
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and thermo-mechanical analysis is presented showing the relation between design parameters and performance. Temperature dependence of trip current is shown to be below 0.2% K-1, and analysis is presented indicating that variation of resistivity is the main cause. Trip time, and its dependence on over-current level, is analysed and the results compared with measurements.
引用
收藏
页码：S109 / S115
页数：7
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