Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD

被引：18

作者：

Bute, A. ^{[1
]}

Jagannath ^{[2
]}

Kar, R. ^{[1
]}

Chopade, S. S. ^{[1
]}

Desai, S. S. ^{[3
]}

Deo, M. N. ^{[4
]}

Rao, Pritty ^{[5
]}

Chand, N. ^{[1
]}

Kumar, S. ^{[5
]}

Singh, K. ^{[6
]}

Patil, D. S. ^{[7
]}

Sinha, S. ^{[1
]}

机构：

[1] Bhabha Atom Res Ctr, Laser & Plasma Technol Div, Bombay 400085, Maharashtra, India

[2] Bhabha Atom Res Ctr, Tech Phys Div, Bombay 400085, Maharashtra, India

[3] Bhabha Atom Res Ctr, Solid State Phys Div, Bombay 400085, Maharashtra, India

[4] Bhabha Atom Res Ctr, High Pressure & Synchrotron Radiat Phys Div, Bombay 400085, Maharashtra, India

[5] Natl Ctr Composit Characterizat Mat, Hyderabad, Andhra Pradesh, India

[6] Bhabha Atom Res Ctr, Fus Reactor Mat Sect, Bombay 400085, Maharashtra, India

[7] Indian Inst Technol, Dept Met Engn & Mat Sci, Bombay 400076, Maharashtra, India

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2016年 / 182卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

Carbides; Plasma-assisted CVD; XPS; FTIR; CHEMICAL-VAPOR-DEPOSITION; RAY PHOTOELECTRON-SPECTROSCOPY; THIN-FILMS; DETECTOR; FABRICATION;

D O I：

10.1016/j.matchemphys.2016.07.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Boron carbide films are increasingly being investigated for their application in new generation neutron detectors. It is implemented as conversion layer for neutrons and emerging as a potential alternative to He-3 based detectors. This work reports synthesis of boron carbide (BxC) films from ortho-carborane (o-C2B10H12) by radio frequency (RF) plasma enhanced chemical vapour deposition (PECVD) technique. Dependence of chemical composition, stoichiometry and total macroscopic cross section (Sigma(t)) has been studied as a function of self-bias on the substrate, varied in the range -75 V to -175 V. Films were characterized by 3D optical profilometry, X-ray photoelectron spectroscopy (XPS), proton elastic back scattering spectrometry (p-EBS), Fourier transform infra-red spectroscopy (FTIR) and Field Emission Scanning Electron Microscope (FESEM). Characterization results show noticeable change in the bulk as well as surface chemical composition, surface morphology and film stoichiometry with self-bias. Neutron transmission measurements exhibit increase in Sigma(t) from 170.47 cm(-1) for -75 V film to 273.38 cm(-1) for -175 V film with self-bias. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：62 / 71

页数：10

共 47 条

[1] CHARACTERIZATION OF A-B/CH FILMS DEPOSITED FROM DIFFERENT BORON CONTAINING PRECURSORS [J].

ALIMOV, VK ;

BOGOMOLOV, DB ;

CHURAEVA, MN ;

GORODETSKY, AE ;

KANASHENKO, SL ;

KANAEV, AI ;

RYBAKOV, SY ;

SHARAPOV, VM ;

ZAKHAROV, AP ;

ZALAVUTDINOV, RK ;

BUZHINSKY, OI ;

CHERNOBAY, AP ;

GRASHIN, SA ;

MIRNOV, SV ;

BREGADZE, VI ;

USYATINSKY, AY .

JOURNAL OF NUCLEAR MATERIALS, 1992, 196 :670-675

[2]

Auroux A., CALORIMETRY THERMAL, V203, pP87

[3] Chemical states of carbon in amorphous boron carbide thin films deposited by radio frequency magnetron sputtering [J].

Bao, Rucliang ;

Chrisey, Douglas B. .

THIN SOLID FILMS, 2010, 519 (01) :164-168

[4] ANALYTICAL INVESTIGATIONS IN THE B-C SYSTEM [J].

BOUCHACOURT, M ;

THEVENOT, F .

JOURNAL OF THE LESS-COMMON METALS, 1981, 82 (1-2) :219-226

[5] The all boron carbide diode neutron detector: Comparison with theory [J].

Caruso, A. N. ;

Dowben, P. A. ;

Balkir, S. ;

Schemm, Nathan ;

Osberg, Kevin ;

Fairchild, R. W. ;

Flores, Oscar Barrios ;

Balaz, Snjezana ;

Harken, A. D. ;

Robertson, B. W. ;

Brand, J. I. .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 135 (02) :129-133

[6] The physics of solid-state neutron detector materials and geometries [J].

Caruso, A. N. .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2010, 22 (44)

[7] SYNTHESIS AND CHARACTERIZATION OF BORON-DOPED CARBONS [J].

CERMIGNANI, W ;

PAULSON, TE ;

ONNEBY, C ;

PANTANO, CG .

CARBON, 1995, 33 (04) :367-374

[8]

Chapman B., 1980, GLOW DISCHARGE PROCE, DOI DOI 10.1063/1.2914660

[9] Fabrication and characterization of silicon based thermal neutron detector with hot wire chemical vapor deposited boron carbide converter [J].

Chaudhari, Pradip ;

Singh, Arvind ;

Topkar, Anita ;

Dusane, Rajiv .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2015, 779 :33-38

[10] PHYSICS Helium-3 Shortage Could Put Freeze On Low-Temperature Research [J].

Cho, Adrian .

SCIENCE, 2009, 326 (5954) :778-779

← 1 2 3 4 5 →