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- [35] Addition of yttrium into HfO2 films: Microstructure and electrical properties JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (03): : 503 - 514
- [39] Ion Implantation Synthesis of Si-doped HfO2 Ferroelectric Thin Films 2018 IEEE 2ND ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM 2018), 2018, : 44 - 46