Optical property modification of PMMA by ion-beam implantation

被引：74
|
作者：
Hong, W [1 ]
Woo, HJ [1 ]
Choi, HW [1 ]
Kim, YS [1 ]
Kim, GD [1 ]
机构：
[1] Korea Inst Geol Min & Mat, Yusong gu, Taejon 305350, South Korea
来源：
APPLIED SURFACE SCIENCE | 2001年 / 169卷
关键词：
waveguide; ion implantation; PMMA; optical properties; refractive index; index depth profile; light loss;
D O I：
10.1016/S0169-4332(00)00698-X
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Polymeric waveguides were fabricated by proton implantation on poly(methyl methacrylate) (PMMA). Depth profiles of the refractive indices of modified regions were obtained and were found to be in good agreement with the stopping power curve of protons in PMMA. It means that the waveguides are formed at the depths where the stopping power is the maximum value. Light losses for 635 nm wavelength were measured using planar waveguides to verify if the transmittance is enough for the application of the technique to optical devices. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：428 / 432
页数：5
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