Surface acoustic wave properties of aluminum oxide films on lithium niobate

被引：5

作者：

Shih, Wen-Ching ^{[1
]}

Wang, Tzyy-Long ^{[1
]}

Hsu, Li-Lun ^{[1
]}

机构：

[1] Tatung Univ, Grad Inst Electroopt Engn, Taipei 104, Taiwan

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 23期

关键词：

Aluminum oxide film; Electron beam evaporation; Lithium niobate; Surface acoustic wave; AL2O3; THIN-FILMS; CARBON-FILMS; DIELECTRIC-PROPERTIES; ELASTIC PROPERTIES; DIAMOND; CRYSTALLINE; MICROSTRUCTURE; DEPOSITION;

D O I：

10.1016/j.tsf.2010.07.029

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aluminum oxide (Al2O3) films have been deposited on lithium niobate (LiNbO3) substrates by electron beam evaporation without any interlayer between them to ensure a good adhesion of the Al2O3 films to LiNbO3 substrates. As Al2O3 thin films can sufficiently increase the surface acoustic wave (SAW) velocity, they can be used to improve the performance of the SAW device. The SAW phase velocity in the Al2O3LiNbO3 structure was found to increase with the insertion of an Al2O3 film, which can be attributed to the stiffening effect of the Al2O3 layer. The velocity change ratio of SAW was about 4.39% (at 304 MHz) for the Al2O3 (9.7 pin)/LiNbO3 sample. A comparison with other findings in literature reveals that this result is better than what is available from diamond-like carbon/SiC buffer layer/LiNbO3 structure, whose the velocity change ratio is 2%. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：7143 / 7146

页数：4

共 50 条

[21] Optimum cut direction of Lithium Niobate as substrate in surface acoustic wave devices
Yu, Kuanxin
Liu, Tao
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTOELECTRONIC MATERIALS AND DEVICES FOR DETECTOR, IMAGER, DISPLAY, AND ENERGY CONVERSION TECHNOLOGY, 2010, 7658
[22] Shear Horizontal Surface Acoustic Wave FIR Filters in Lithium Niobate on Insulator
Guida, Jack
Yegnanarayanan, Siva
Ricci, Matthew
Ghosh, Siddhartha
2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS), 2022,
[23] Surface Acoustic Wave Resonators Using Lithium Niobate on Silicon Carbide Platform
Zhang, Shibin
Lu, Ruochen
Zhou, Hongyan
Link, Steffen
Yang, Yansong
Li, Zhongxu
Huang, Kai
Ou, Xin
Gong, Songbin
PROCEEDINGS OF THE 2020 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2020, : 253 - 256
[24] Monolithic Strong Coupling of Topological Surface Acoustic Wave Resonators on Lithium Niobate
Zhang, Zi-Dong
Yu, Si-Yuan
Xu, Haitan
Lu, Ming-Hui
Chen, Yan-Feng
ADVANCED MATERIALS, 2024, 36 (21)
[25] Features of surface acoustic wave propagation in lithium niobate damaged by an electron beam
Kryshtal, RG
Medved, AV
TECHNICAL PHYSICS, 2003, 48 (08) : 1024 - 1027
[26] Resonant properties of fast leaky surface acoustic waves on lithium niobate
Grigorievski, VI
2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 197 - 200
[27] Surface acoustic wave properties of lithium tantalate films grown by pulsed laser deposition
Shibata, Yoshihiko
Kuze, Naohiro
Matsui, Masahiro
Kanno, Yasuhito
Kaya, Kiyoshi
Ozaki, Masaru
Kanai, Masaki
Kawai, Tomoji
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1995, 34 (01): : 249 - 253
[28] SURFACE ACOUSTIC-WAVE VELOCITIES FOR TWO METAL LAYERS ON LITHIUM-NIOBATE AND BISMUTH GERMANIUM OXIDE SUBSTRATES
SOLIE, LP
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1973, SU20 (04): : 379 - 382
[29] Comparative study of lithium niobate thin films-based surface acoustic wave resonators including temperature characterization
Liu, Luyao
Wu, Shuxian
Wu, Ting
Bao, Feihong
Wang, Feifei
Zhao, Xiangyong
Zhang, Qiaozhen
Zou, Jie
APPLIED PHYSICS LETTERS, 2025, 126 (11)
[30] Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Zhang, Naiqing
Friend, James
JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 2020, (156):

← 1 2 3 4 5 →