Piezoelectric Actuator for High Resolution Linear Displacement Systems

被引：0

作者：

Bansevicius, R. ^{[1
]}

Jurenas, V. ^{[1
]}

Grigaliunas, V. ^{[1
]}

Vilkauskas, A. ^{[1
]}

机构：

[1] Kaunas Univ Technol, Kaunas, Lithuania

来源：

JOURNAL OF VIBROENGINEERING | 2010年 / 12卷 / 04期

关键词：

piezoelectric actuator; strain gage feedback; high resolution;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This work presents a piezoelectric actuator which is designed to improve resolution for micrometer screws or motorized actuators such as actuators with stepper motors. Several modifications of piezoelectric actuator were implemented for closed-loop and open-loop applications. For closed-loop applications strain gages are used to obtain a feedback signal. As a result a resolution of displacement measurement up to 18 nm is achieved.

引用

收藏

页码：629 / 634

页数：6

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