Waveguide grating mirror in a fully suspended 10 meter Fabry-Perot cavity

We report on the first demonstration of a fully suspended 10 m Fabry-Perot cavity incorporating a waveguide grating as the coupling mirror. The cavity was kept on resonance by reading out the length fluctuations via the Pound-Drever-Hall method and employing feedback to the laser frequency. From the achieved finesse of 790 the grating reflectivity was determined to exceed 99.2% at the laser wavelength of 1064 nm, which is in good agreement with rigorous simulations. Our waveguide grating design was based on tantala and fused silica and included a approximate to 20 nm thin etch stop layer made of Al2O3 that allowed us to define the grating depth accurately and preserve the waveguide thickness during the fabrication process. Demonstrating stable operation of a waveguide grating featuring high reflectivity in a suspended low-noise cavity, our work paves the way for the potential application of waveguide gratings as mirrors in high-precision interferometry, for instance in future gravitational wave observatories. (C) 2011 Optical Society of America